CAS No.: | None |
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Formula: | None |
EINECS: | None |
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Methylsilane(MS)
The container is made of carbon steel cylider with its inner wall mirror polished and passivated. There are two specifications available in capacity: 10L and 47L. And there are 3 kinds of valves available: CGA660/CGA350/CGA634. Different volume containers are packaged with a filling coefficient of 0.25 kg/L. Customized packaging and interfaces can also be provided.
Material grade methylsilane | |
Gas name | Methylsilane(CH3SiH3) |
Ingredients/Impurity Names | Product Specifications |
Methylsilane | ≥99.5 % |
Non condensable gas impurities (N2,O2+Ar,CO2,CH4) |
≤0.2% |
Silane | ≤0.2% |
Chlorosilane | ≤0.1% |
Electrical grade methylsilane | |
Gas name | Methylsilane(CH3SiH3) |
Ingredients/Impurity Names | Product Specifications |
SiH3CH3 | >99.98%(Excluding other methylsilanes) |
N2 | ≤10ppm/v |
Ar+O2 | ≤2ppm/v |
CO2 | ≤10ppm/v |
CH4 | ≤50ppm/v |
SiH4 | ≤50ppm/v |
Other Methylsilanes | ≤50ppm/v |
Chlorosilanes | ≤50ppm/v |